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For the MEMS device market ULVAC offers solutions for various processes covering equipment and technologies for sputtering, etching and ashing/stripping. Our low temperature technology for the sputtering of PZT stack enables the integration of MEMS devices into CMOS. In addition we offer production proven dry etching technology for the etching of piezoelectric stack. All ULVAC products are supported by its local sales and service networks.
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